Cryogen free, no liquid He4 required, cooled to ~ 4K with Pulse Tube Refrigerator
Fully automated operation
Bottom loader provides with fast sample exchange without need to warm up the whole system to the room temperature
Cooling time from room temperature to 10mK:
without magnet < 24h
with magnet ~ 50h
with fast loading ~ 10h
The most wired fridge in the world:
8 microwave lines
12 Thermocoax lines
6 S1 coax lines
4 shielded twisted pairs
Loom of 12 twisted pairs of Cu wires
Loom of 12 twisted pairs of Cu/Supercon wires
Sample puck equipped with 14 SMP connectors and 51 pin DC Nanoconnector
Temperature range:
without magnet 10mK – 300K
with magnet 10mK- 30K
Cryogenic system (made by Cryoengineering Group SL-2.1 IF PAN Warsaw) equipped with 9 T superconducting magnet. It is designed for two different inserts: A) plastic dilution refrigerator He3/He4 (PDU-40 Nanoway, University of Jyvaskyla, Finland) with base temperature 30 mK and useful sample space diameter 20 mm. B) standard variable temperature insert for the range from 1.5 K to 300 K. Both inserts are used for transport measurements.
Two SQUID magnetometers Quantum Design MPMS XL, 1.9 - 400 K (800K with added apparatus), up to 5T in AC, DC, RSO modes.
He3 cryogenic system, made by Cryo Industries of America designed for electrical measurements in the temperature range from 0.25 to 300 K and in magnetic fields up to 6 T. Measured sample is placed in vacuum, on the cold finger. He3 hold time at base temperature is about 24 h. He3 insert external diameter 3’’, useful sample space up to 4?4?4 cm. The whole system is placed in e-m shielded room A1 class (shielding effectiveness 100 dB in the range 100 kHz – 5 GHz) made by Military Institute of Communication, Zegrze, Poland.
Scanning electron microscope ZEISS Auriga - CrossBeam Workstation ( Ion imaging resolution of 2.5 nm at 30 kV, electron imaging resolution 1 nm at 15 kV ).
A reactive Gas Injection System for reactive ion etching (XeF2) and Pt/SiO2/W deposition.
Nano-manipulators dedicated to electrical measurements and TEM sample preparation
(Kleindiek, 0.5 nm resolution).
Electron/Ion beam lithography, (Raith Elphy Plus, Nanopatterning Engine).
Piezoelectric stage - high precision substage (Kleindiek, 0.5 nm resolution).
EDX - XFlash Silicon Drift Detector 5030 (Bruker) for low beam current applications,energy resolution of 127 eV.
Scanning electron microscope ZEISS EVO HD15 SEM: Emitter - LaB6, resolution - 2.0 nm at 30 kV.
HORIBA Jobin Yvon CL.
Kammrath & Weiss cryostat.
Peltier cryostat.
Raith Elphy + e-beam lithography system in a clean room ( 16 bit DAC, vector scan writing mode, mark recognition and alignment, laser interferometer controlled stage with resolution 5 nm and overlay accuracy < 100 nm).
Proximity corrections software.
X - ray microprobe L200D Link ISIS.
related processing infrastructure (hot plate/spinner, bonder, vacuum evaporator..)