SL-1.6 Secondary Ion Mass Spectrometry

Head of the group:

Doc. dr hab. Adam Barcz

Scientific staff:

Dr Marcin Zielinski zielin@

Mgr Rafal Jakiela jakiela@

Main subject of research:

1. SIMS analysis of atomic composition of semiconductor materials.
2. Determination of mass spectra and element's depth profiles.

Major facilities:

• Secondary Ion Mass Spectrometer IMS 6f (CAMECA, France)