Deep Level Transient Spectroscopy (DLTS)

Measurement modes:


  • capacitance and current transients analysis,
  • variety of numerical methods for the Laplace transform inversion (see software section for more details),
  • scripts which allow to program sequences of Laplace measurements, an ideal tool for measurement automatisation, sample annealing processes, for performing measurements in series etc.,
  • transient simulation program for testing built-in numerical methods;


  • single temperature scan: on-the-fly exponential fitting; hundreds of rate windows, the CT curve normalisation function,
  • single temperature scan: simultaneous 9-rate windows measurements (see example (http://info NULL.ifpan NULL.pdf), courtesy of Dr V. P. Markevich),
  • multiple temperature scans with 2 rate windows each; the TrapView software version 4.0;

Sample pulsing modes:

  • Single pulse (Lang’s classical mode (http://dx NULL.doi NULL.1063/1 NULL.1663719)),
  • Double pulse (DDLTS) for the electric field dependence and trap profiling,
  • Injection pulse for carrier recombination processes analysis (see an example (http://dx NULL.doi NULL.1063/1 NULL.351483)),
  • Minority Carrier Transient Spectroscopy (MCTS (http://dx NULL.doi NULL.1063/1 NULL.325728)).

Accompanying measurements

  • C-V characteristics and junction profiling (using the DLTS hardware or an external meter, if available),
  • I-V with an external meter,
  • C-T (capacitance vs. temperature) plot (using the DLTS hardware or an external meter, if available),
  • Other: the system can be easily reconfigured for any exponential transient processing, e.g. photoluminescence decay, magnetic properties evolution, device ageing, defect diffusion processes, etc.

Measurement data base

Stores all information about the above mentioned measurements, samples, materials; allows for data manipulation, analysis, visualisation, comparison, etc. (see software section for more details).